Laser-fiber-coupling by means of a silicon micro-optical bench and a self-aligned soldering process

authored by: J P Schmidt, A. Cordes, Jürgen Müller, H. Burkhardt
Abstract: The alignment of laser diodes to monomode fibers has to meet extremely close tolerances for a low coupling loss. Typically < 0.5μm in lateral and vertical direction and less than two degrees in angle deviation are allowed for a coupling loss below 2 dB. Presently such close tolerances can only be met by glueing or soldering both components on separate base plates and combining them via piezoactivated alignment monitoring the output of the circuit and then glueing them using UV-hardening epoxies. Such a procedure is not very economical and not useful for mass applications. This paper presents the principle and realization of a silicon micro-optical bench for laser-fiber-coupling, which avoids the above mentioned disadvantages. The micro-optical bench is realized using well controlled plasma etching processes to transfer the guiding patterns for the laser and the fiber into the silicon substrate, keeping geometry tolerances below ± 0.5 μm in lateral and vertical direction. Mounting the laser diode by means of a selfaligned soldering process, an additional contribution to the precise alignment of the laser is further improved.
External Organisation(s): Hamburg University of Technology (TUHH)
Deutsche Telekom AG
Type: Conference article
Journal: Proceedings of SPIE - The International Society for Optical Engineering
Volume: 2449
Pages: 176-183
No. of pages: 8
ISSN: 0277-786X
Publication date: 22.02.1995
Publication status: Published
Peer reviewed: Yes
ASJC Scopus subject areas: Electronic, Optical and Magnetic Materials, Condensed Matter Physics, Computer Science Applications, Applied Mathematics, Electrical and Electronic Engineering
Electronic version(s): https://doi.org/10.1117/12.201968 (Access: Closed)

BibTeX

@article{ca918a130a3944c7bb9242f472179cb9,
title = "Laser-fiber-coupling by means of a silicon micro-optical bench and a self-aligned soldering process",
abstract = "The alignment of laser diodes to monomode fibers has to meet extremely close tolerances for a low coupling loss. Typically < 0.5μm in lateral and vertical direction and less than two degrees in angle deviation are allowed for a coupling loss below 2 dB. Presently such close tolerances can only be met by glueing or soldering both components on separate base plates and combining them via piezoactivated alignment monitoring the output of the circuit and then glueing them using UV-hardening epoxies. Such a procedure is not very economical and not useful for mass applications. This paper presents the principle and realization of a silicon micro-optical bench for laser-fiber-coupling, which avoids the above mentioned disadvantages. The micro-optical bench is realized using well controlled plasma etching processes to transfer the guiding patterns for the laser and the fiber into the silicon substrate, keeping geometry tolerances below ± 0.5 μm in lateral and vertical direction. Mounting the laser diode by means of a selfaligned soldering process, an additional contribution to the precise alignment of the laser is further improved.",
author = "Schmidt, {J P} and A. Cordes and J{\"u}rgen M{\"u}ller and H. Burkhardt",
year = "1995",
month = feb,
day = "22",
doi = "10.1117/12.201968",
language = "English",
volume = "2449",
pages = "176--183",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",
note = "Fiber Optic Network Components 1995 ; Conference date: 20-03-1995 Through 24-03-1995",
}