Laser-fiber-coupling by means of a silicon micro-optical bench and a self-aligned soldering process

verfasst von: J P Schmidt, A. Cordes, Jürgen Müller, H. Burkhardt
Abstract: The alignment of laser diodes to monomode fibers has to meet extremely close tolerances for a low coupling loss. Typically < 0.5μm in lateral and vertical direction and less than two degrees in angle deviation are allowed for a coupling loss below 2 dB. Presently such close tolerances can only be met by glueing or soldering both components on separate base plates and combining them via piezoactivated alignment monitoring the output of the circuit and then glueing them using UV-hardening epoxies. Such a procedure is not very economical and not useful for mass applications. This paper presents the principle and realization of a silicon micro-optical bench for laser-fiber-coupling, which avoids the above mentioned disadvantages. The micro-optical bench is realized using well controlled plasma etching processes to transfer the guiding patterns for the laser and the fiber into the silicon substrate, keeping geometry tolerances below ± 0.5 μm in lateral and vertical direction. Mounting the laser diode by means of a selfaligned soldering process, an additional contribution to the precise alignment of the laser is further improved.
Externe Organisation(en): Technische Universität Hamburg (TUHH)
Deutsche Telekom AG
Typ: Konferenzaufsatz in Fachzeitschrift
Journal: Proceedings of SPIE - The International Society for Optical Engineering
Band: 2449
Seiten: 176-183
Anzahl der Seiten: 8
ISSN: 0277-786X
Publikationsdatum: 22.02.1995
Publikationsstatus: Veröffentlicht
Peer-reviewed: Ja
ASJC Scopus Sachgebiete: Elektronische, optische und magnetische Materialien, Physik der kondensierten Materie, Angewandte Informatik, Angewandte Mathematik, Elektrotechnik und Elektronik
Elektronische Version(en): https://doi.org/10.1117/12.201968 (Zugang: Geschlossen)

BibTeX

@article{ca918a130a3944c7bb9242f472179cb9,
title = "Laser-fiber-coupling by means of a silicon micro-optical bench and a self-aligned soldering process",
abstract = "The alignment of laser diodes to monomode fibers has to meet extremely close tolerances for a low coupling loss. Typically < 0.5μm in lateral and vertical direction and less than two degrees in angle deviation are allowed for a coupling loss below 2 dB. Presently such close tolerances can only be met by glueing or soldering both components on separate base plates and combining them via piezoactivated alignment monitoring the output of the circuit and then glueing them using UV-hardening epoxies. Such a procedure is not very economical and not useful for mass applications. This paper presents the principle and realization of a silicon micro-optical bench for laser-fiber-coupling, which avoids the above mentioned disadvantages. The micro-optical bench is realized using well controlled plasma etching processes to transfer the guiding patterns for the laser and the fiber into the silicon substrate, keeping geometry tolerances below ± 0.5 μm in lateral and vertical direction. Mounting the laser diode by means of a selfaligned soldering process, an additional contribution to the precise alignment of the laser is further improved.",
author = "Schmidt, {J P} and A. Cordes and J{\"u}rgen M{\"u}ller and H. Burkhardt",
year = "1995",
month = feb,
day = "22",
doi = "10.1117/12.201968",
language = "English",
volume = "2449",
pages = "176--183",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",
note = "Fiber Optic Network Components 1995 ; Conference date: 20-03-1995 Through 24-03-1995",
}