Enhanced stereo SEM measurement of sub-micrometer structures

authored by

T. Schultheis, T. Vynnyk, T. Fahlbusch, E. Reithmeier

Organisation(s)

Institute of Measurement and Control Engineering

Type

Conference contribution

No. of pages

3

Publication date

2009

Publication status

Published

Electronic version(s)

https://www.imr.uni-hannover.de/index.php?eID=tx_securedownloads&p=89&u=0&g=0&t=1604993213&hash=f1ff17fb479c5b085e1b96c42f14e0e56012ac46&file=/uploads/tx_tkpublikationen/EOScapri2009_-_Schultheis_Thanin_-_2374.pdf (Access: Open)