An on-wafer deembedding procedure for devices under measurement with error-networks containing arbitrary line lengths

authored by: Thomas Michael Winkel, Lohit Sagar Dutta, Hartmut Grabinski
Abstract: Error networks that include contact structures and which embed devices under measurement (DUM) can often be partitioned into different line segments having constant line widths. The basic idea of the here proposed deembedding procedure is the calculation of the error network from a piece by piece characterization of the line segments. In the first step of the proposed deembedding method, the propagation constants and the characteristic impedances of the various line segments are calculated from high frequency S-parameter measurements. In the second step, the chain parameter matrix A _seg of the different line segments are then calculated. The third step consists of the calculation of the chain parameter matrix A _error of the complete error network. Finally, one can calculate the scattering chain parameter matrix T _error from the related chain parameter matrix A' _error of the complete error network. The main advantage of this method lies in the fact that only thru lines with different line lengths have to be measured. A further advantage of this deembedding procedure is that the error networks embedding different DUM's can contain line segments of arbitrary line lengths. Therefore, the proposed deembedding procedure can be used for DUM's that are embedded in error networks that consist of different line segments with constant line widths.
Organisation(s): Laboratorium f. Informationstechnologie
Type: Conference contribution
Pages: 102-111
No. of pages: 10
Publication date: 1996
Publication status: Published
Peer reviewed: Yes
ASJC Scopus subject areas: Electrical and Electronic Engineering
Electronic version(s): https://doi.org/10.1109/ARFTG.1996.327170 (Access: Closed)

BibTeX

@inproceedings{c3189a06b40543188d68dd5c0bfe9d21,
title = "An on-wafer deembedding procedure for devices under measurement with error-networks containing arbitrary line lengths",
abstract = " Error networks that include contact structures and which embed devices under measurement (DUM) can often be partitioned into different line segments having constant line widths. The basic idea of the here proposed deembedding procedure is the calculation of the error network from a piece by piece characterization of the line segments. In the first step of the proposed deembedding method, the propagation constants and the characteristic impedances of the various line segments are calculated from high frequency S-parameter measurements. In the second step, the chain parameter matrix A seg of the different line segments are then calculated. The third step consists of the calculation of the chain parameter matrix A error of the complete error network. Finally, one can calculate the scattering chain parameter matrix T error from the related chain parameter matrix A' error of the complete error network. The main advantage of this method lies in the fact that only thru lines with different line lengths have to be measured. A further advantage of this deembedding procedure is that the error networks embedding different DUM's can contain line segments of arbitrary line lengths. Therefore, the proposed deembedding procedure can be used for DUM's that are embedded in error networks that consist of different line segments with constant line widths.",
author = "Winkel, {Thomas Michael} and Dutta, {Lohit Sagar} and Hartmut Grabinski",
year = "1996",
doi = "10.1109/ARFTG.1996.327170",
language = "English",
series = "47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "102--111",
booktitle = "47th ARFTG Conference Digest - Spring 1996",
address = "United States",
note = "47th ARFTG Conference, ARFTG 1996 ; Conference date: 20-06-1996 Through 21-06-1996",
}