New machining concept for manufacturing microstructures with excimer lasers

authored by

H. K. Tönshoff, Ludger Overmeyer, Andreas Ostendorf, Hanno Hesener

Abstract

The manufacturing of microcomponents with excimer lasers, especially for small series and batch production, is an alternative to other established micromanufacturing methods associated with etch-technology. To avoid long nonproductive times, a general and flexible machining concept is presented, which is based on the mask projection of the excimer laser beam. Beginning the process chain with the workpiece design, a developed preprocessor is able to calculate the overall removal volume from computer-aided design (CAD) data and to break down into elementary volumes that are able to be processed with single laser pulses. Moreover, based on the restrictions of the excimer laser process, a set of NC data is generated to automatically start the production process. The reliability of the system is proven with different geometries such as microgear wheels and microlenses.

External Organisation(s)

Laser Zentrum Hannover e.V. (LZH)

Type

Article

Journal

Machining Science and Technology

Volume

1

Pages

153-162

No. of pages

10

ISSN

1091-0344

Publication date

01.1997

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

General Materials Science, Mechanical Engineering, Industrial and Manufacturing Engineering

Electronic version(s)

https://doi.org/10.1080/10940349708945642 (Access: Unknown)