Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers
- authored by
- Norbert Kaiser, Bernhard Anton, H. Jaenchen, Klaus R. Mann, Eric Eva, C. Fischer, Rainer Henking, Detlev Ristau, Peter Weissbrodt, Dirk Mademann, L. Raupach, Erich Hacker
- Abstract
LaF 3/MgF 2-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.
- External Organisation(s)
-
Laser-Laboratorium Göttingen e.V.
Laser Zentrum Hannover e.V. (LZH)
JENOPTIK Laser GmbH
Fraunhofer Institute for Applied Optics and Precision Engineering (IOF)
- Type
- Paper
- Pages
- 400-409
- No. of pages
- 10
- Publication date
- 14.07.1995
- Publication status
- Published
- Peer reviewed
- Yes
- ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials, Condensed Matter Physics, Computer Science Applications, Applied Mathematics, Electrical and Electronic Engineering
- Electronic version(s)
-
https://doi.org/10.1117/12.213762 (Access:
Unknown)
