Strained state of Ge(Si) islands on Si

Finite element calculations and comparison to convergent beam electron-diffraction measurements

authored by
S. Christiansen, M. Albrecht, H. P. Strunk, H. J. Maier
Abstract

In this letter we present calculations by three-dimensional finite element method and measurements by convergent beam electron diffraction of the displacement field resulting from misfitting Ge0.85Si0.25 islands on Si(001). A good agreement between the results of both methods indicates that the three-dimensional finite element method is a reliable tool to calculate the strain, and thus the stress field, in such nanostructures. As a result both methods show that the substrate substantially takes part in the elastic relaxation process in such heteroepitaxial systems.

External Organisation(s)
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU Erlangen-Nürnberg)
Type
Article
Journal
Applied physics letters
Volume
64
Pages
3617-3619
No. of pages
3
ISSN
0003-6951
Publication date
1994
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Physics and Astronomy (miscellaneous)
Electronic version(s)
https://doi.org/10.1063/1.111217 (Access: Unknown)