Einfluss von Kohlenstoff-Deltaschichten auf die Defektausbreitung in der Germaniumepitaxie

authored by

Yvo Barnscheidt

supervised by

Hans-Jörg Osten

Organisation(s)

Institute of Electronic Materials and Devices

Type

Doctoral thesis

No. of pages

169

Publication date

2021

Publication status

Published

Electronic version(s)

https://doi.org/10.15488/11162 (Access: Open)