3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

authored by

T. Vynnyk, T. Schultheis, T. Fahlbusch, E. Reithmeier

Abstract

In this paper the photometric or the so called "shape from shading" method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.

Organisation(s)

Institute of Measurement and Control Engineering

Type

Article

Journal

Journal of the European Optical Society

Volume

5

ISSN

1990-2573

Publication date

2010

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Electronic version(s)

https://doi.org/10.2971/jeos.2010.10038s (Access: Open)