3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

verfasst von

T. Vynnyk, T. Schultheis, T. Fahlbusch, E. Reithmeier

Abstract

In this paper the photometric or the so called "shape from shading" method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.

Organisationseinheit(en)

Institut für Mess- und Regelungstechnik

Typ

Artikel

Journal

Journal of the European Optical Society

Band

5

ISSN

1990-2573

Publikationsdatum

2010

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Atom- und Molekularphysik sowie Optik

Elektronische Version(en)

https://doi.org/10.2971/jeos.2010.10038s (Zugang: Offen)