Reduction of droplet emission in random arc technology

verfasst von: H. D. Steffens, M. Mack, K. Moehwald, K. Reichel
Abstract: The influence of a static magnetic field (0-10 mT at the emission plane of the cathode) in random arc reactive physical vapour deposition (PVD) (TiN, CrN) and non-reactive PVD (titanium, chromium, copper, nickel) has been investigated using various cathode designs. The dominant effect of an increased magnetic field was a more confined arc trace. In non-reactive processes, detrimental selective cathode erosion was observed. In reactive processes, improved nitriding resulted. A distinct reduction in droplet emission was achieved only with a high melting nitride layer (TiN). Cathode design may assist in droplet reduction by further confinement of the arc trace. In all reactive processes, changes in layer microstructure were detected indicating a decrease in ion energy with increasing magnetic field. Surface roughness values comparable with those obtained in steered arc PVD can be achieved, using strong static magnetic fields combined with modified cathode design, if the process is run at a stabilized steady state nitrogen pressure of about 1 Pa from its very start.
Externe Organisation(en): Technische Universität Dortmund
Typ: Artikel
Journal: Surface and Coatings Technology
Band: 46
Seiten: 65-74
Anzahl der Seiten: 10
ISSN: 0257-8972
Publikationsdatum: 30.05.1991
Publikationsstatus: Veröffentlicht
Peer-reviewed: Ja
ASJC Scopus Sachgebiete: Allgemeine Chemie, Physik der kondensierten Materie, Oberflächen und Grenzflächen, Oberflächen, Beschichtungen und Folien, Werkstoffchemie
Elektronische Version(en): https://doi.org/10.1016/0257-8972(91)90150-U (Zugang: Geschlossen)

BibTeX

@article{87811575ce3c4f44b7eb664921e6263a,
title = "Reduction of droplet emission in random arc technology",
abstract = "The influence of a static magnetic field (0-10 mT at the emission plane of the cathode) in random arc reactive physical vapour deposition (PVD) (TiN, CrN) and non-reactive PVD (titanium, chromium, copper, nickel) has been investigated using various cathode designs. The dominant effect of an increased magnetic field was a more confined arc trace. In non-reactive processes, detrimental selective cathode erosion was observed. In reactive processes, improved nitriding resulted. A distinct reduction in droplet emission was achieved only with a high melting nitride layer (TiN). Cathode design may assist in droplet reduction by further confinement of the arc trace. In all reactive processes, changes in layer microstructure were detected indicating a decrease in ion energy with increasing magnetic field. Surface roughness values comparable with those obtained in steered arc PVD can be achieved, using strong static magnetic fields combined with modified cathode design, if the process is run at a stabilized steady state nitrogen pressure of about 1 Pa from its very start.",
author = "Steffens, {H. D.} and M. Mack and K. Moehwald and K. Reichel",
year = "1991",
month = may,
day = "30",
doi = "10.1016/0257-8972(91)90150-U",
language = "English",
volume = "46",
pages = "65--74",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "1",
}