Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths

authored by

Erik Jansson, Volker Scheuer, Elena Jordan, Konstantina Kostourou, Tanja e. Mehlstäubler

Abstract

The transparent and conductive properties of indium tin oxide (ITO) thin films make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths<400 nm, high scattering, and high production temperature limit the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO+anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths <400 nm and additional wavelengths up to 1000 nm, low scattering, and low production temperature <150

^◦C. The transmission, reflection, and absorption spectra are simulated and the resistance, transmittance, and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 ± 5/, transmittance of 80%, and scattering of 0.012 ± 0.002% at 370 nm are achieved.

Organisation(s)

Institute of Quantum Optics

External Organisation(s)

Physikalisch-Technische Bundesanstalt PTB

Type

Article

Journal

Applied optics

Volume

Pages

1715-1722

No. of pages

ISSN

0003-6935

Publication date

24.02.2025

Publication status

Published

Peer reviewed

Yes

Electronic version(s)

https://doi.org/10.1364/AO.547471 (Access: Closed)

BibTeX

@article{6b54c10a66944fce8ae53472b2c40d3b,
title = "Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths",
abstract = "The transparent and conductive properties of indium tin oxide (ITO) thin films make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths<400 nm, high scattering, and high production temperature limit the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO+anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths <400 nm and additional wavelengths up to 1000 nm, low scattering, and low production temperature <150 ◦C. The transmission, reflection, and absorption spectra are simulated and the resistance, transmittance, and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 ± 5/, transmittance of 80%, and scattering of 0.012 ± 0.002% at 370 nm are achieved.",
author = "Erik Jansson and Volker Scheuer and Elena Jordan and Konstantina Kostourou and Mehlst{\"a}ubler, {Tanja e.}",
year = "2025",
month = feb,
day = "24",
doi = "10.1364/AO.547471",
language = "English",
volume = "64",
pages = "1715--1722",
journal = "Applied optics",
issn = "0003-6935",
publisher = "OSA - The Optical Society",
number = "7",
}