Mixed oxide coatings for optics

authored by: Olaf Stenzel, Steffen Wilbrandt, Mark Schürmann, Norbert Kaiser, Henrik Ehlers, Mathias Mende, Detlev Ristau, Stefan Bruns, Michael Vergöhl, Markus Stolze, Mario Held, Hansjörg Niederwald, Thomas Koch, Werner Riggers, Peer Burdack, Günter Mark, Rolf Schäfer, Stefan Mewes, Martin Bischoff, Markus Arntzen, Frank Eisenkrämer, Marc Lappschies, Stefan Jakobs, Stephan Koch, Beate Baumgarten, Andreas Tünnermann
Abstract: Material mixtures offer new possibilities for synthesizing coating materials with tailored optical andmechanical properties.We present experimental results on mixtures of HfO2, ZrO2, and Al2O3, pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mechanical stress. The first high reflectors for UVapplications have been deposited by PIAD.
External Organisation(s): Fraunhofer Institute for Applied Optics and Precision Engineering (IOF)
Laser Zentrum Hannover e.V. (LZH)
Fraunhofer-Institute for Surface Engineering and Thin Films (IST)
Umicore Thin Film Products AG
Bte Bedampfungstechnik GmbH
Carl Zeiss SMT GmbH
Laseroptik GmbH
InnoLight GmbH
Melec GmbH
Robeko
Qioptiq Photonics GmbH and Co.KG
Arcon II Flachglasveredelung GmbH and Co. KG
Leica Microsystems CMS GmbH
Optics Balzers Jena GmbH
Berliner Glas KGaA Herbert Kubatz GmbH and Co.
Friedrich Schiller University Jena
Type: Article
Journal: Applied Optics
Volume: 50
Pages: C69-C74
ISSN: 1559-128X
Publication date: 20.03.2011
Publication status: Published
Peer reviewed: Yes
ASJC Scopus subject areas: Atomic and Molecular Physics, and Optics, Engineering (miscellaneous), Electrical and Electronic Engineering
Electronic version(s): https://doi.org/10.1364/AO.50.000C69 (Access: Unknown)

BibTeX

@article{2978d89a0ee64015a19f185bed208d56,
title = "Mixed oxide coatings for optics",
abstract = "Material mixtures offer new possibilities for synthesizing coating materials with tailored optical andmechanical properties.We present experimental results on mixtures of HfO2, ZrO2, and Al2O3, pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mechanical stress. The first high reflectors for UVapplications have been deposited by PIAD.",
author = "Olaf Stenzel and Steffen Wilbrandt and Mark Sch{\"u}rmann and Norbert Kaiser and Henrik Ehlers and Mathias Mende and Detlev Ristau and Stefan Bruns and Michael Verg{\"o}hl and Markus Stolze and Mario Held and Hansj{\"o}rg Niederwald and Thomas Koch and Werner Riggers and Peer Burdack and G{\"u}nter Mark and Rolf Sch{\"a}fer and Stefan Mewes and Martin Bischoff and Markus Arntzen and Frank Eisenkr{\"a}mer and Marc Lappschies and Stefan Jakobs and Stephan Koch and Beate Baumgarten and Andreas T{\"u}nnermann",
year = "2011",
month = mar,
day = "20",
doi = "10.1364/AO.50.000C69",
language = "English",
volume = "50",
pages = "C69--C74",
journal = "Applied Optics",
issn = "1559-128X",
publisher = "OSA - The Optical Society",
number = "9",
}