3D-measurement using a scanning electron microscope

verfasst von

Eduard Reithmeier, Taras Vynnyk, Thanin Schultheis

Abstract

In this paper the improved photometric or the so called "Shape From Shading" method is presented. In comparison to known and established approaches the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. The method retrieves more accurate data of sub-micrometer substructures like diffractive optical elements (DOE) due to an increased lateral resolution and works more efficiently than widely used comparable techniques.

Organisationseinheit(en)

Institut für Mess- und Regelungstechnik

Typ

Artikel

Journal

Applied Mathematics and Computation

Band

217

Seiten

1193-1201

Anzahl der Seiten

9

ISSN

0096-3003

Publikationsdatum

01.10.2010

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Computational Mathematics, Angewandte Mathematik

Elektronische Version(en)

https://doi.org/10.1016/j.amc.2010.01.107 (Zugang: Geschlossen)