Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques

verfasst von: Olaf Stenzel, Mark Schürmann, Steffen Wilbrandt, Norbert Kaiser, Andreas Tünnermann, Mathias Mende, Henrik Ehlers, Detlev Ristau, Stefan Bruns, Michael Vergöhl, Werner Riggers, Martin Bischoff, Mario Held
Abstract: The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.
Externe Organisation(en): Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Laser Zentrum Hannover e.V. (LZH)
Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST)
Laseroptik GmbH
Qioptiq Photonics GmbH and Co.KG
Bte Bedampfungstechnik GmbH
Typ: Aufsatz in Konferenzband
Publikationsdatum: 03.10.2011
Publikationsstatus: Veröffentlicht
Peer-reviewed: Ja
ASJC Scopus Sachgebiete: Elektronische, optische und magnetische Materialien, Physik der kondensierten Materie, Angewandte Informatik, Angewandte Mathematik, Elektrotechnik und Elektronik
Elektronische Version(en): https://doi.org/10.1117/12.896775 (Zugang: Unbekannt)

BibTeX

@inproceedings{512b90ecf7e94242b6e545aea1fafeed,
title = "Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques",
abstract = "The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.",
keywords = "Alumina, Hafnia, Mechanical stress, Multilayers, Optical constants",
author = "Olaf Stenzel and Mark Sch{\"u}rmann and Steffen Wilbrandt and Norbert Kaiser and Andreas T{\"u}nnermann and Mathias Mende and Henrik Ehlers and Detlev Ristau and Stefan Bruns and Michael Verg{\"o}hl and Werner Riggers and Martin Bischoff and Mario Held",
year = "2011",
month = oct,
day = "3",
doi = "10.1117/12.896775",
language = "English",
isbn = "9780819487940",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Advances in Optical Thin Films IV",
note = "Advances in Optical Thin Films IV ; Conference date: 05-09-2011 Through 07-09-2011",
}